Leak detection system

ABSTRACT

A leak-detection system for vacuum vessels and containers. A probe gas, such as helium, is detected flowing out of leaks in the vacuum vessel by directing such leaks to the exhaust of a molecular drap pump providing a high vacuum to a mass spectrometer&#39;s detection chamber. The probe gas is injected with dynamic flow having turbulent, laminar and transitional flow-characteristics. The helium flows rearwardly through the molecular drag pump by the process of cavitation and dynamic mixing until it is tranformed into molecular flow and directed to the detection chamber of the mass spectrometer for detection. A series of support pumps back up the molecular drag pump, between any two of which gross probe gas leaks may be introduced. The system of the invention has application to pure gas separation of one gas from a heavier gas.

BACKGROUND OF THE INVENTION

The present invention is directed to a system for detecting air leaks invessels and containers in which a vacuum is formed. Leak-detection invessels and containers used in a vacuum environment is well-known, suchdetection utilizing the detection of leaks of helium previously pumpedinto the vacuum vessel expressly for the purpose of detecting potentialleaks. Helium leak-detection is possible owing to the lightness of thegas and its concomitant small molecular size, allowing detection of eventhe smallest hole or tear. The leaking helium is detected by a simpleand conventional mass spectrometer that is designed to detect onlyhelium gas. However, for such a mass spectrometer to operateeffectively, such must be evacuated to high vacuum, which allows theprobe, or leaking, helium to be drawn into the detecting chamber of themass spectrometer, and detected by the helium-sensing head. However,since the probe helium gas is traveling from an essentially atmosphericpressure environment to one of very high vacuum in the detecting chamberof the mass spectrometer, complicated and expensive variable-leakthrottling valves are required to allow for the introduction of thehigher pressure helium into the detection chamber of the massspectrometer so that the helium sensing head thereof is not adverselyaffected by a rise in pressure. The complex throttling valve allows forsuch introduction. In order to sustain the high vacuum in the detectionchamber of the mass spectrometer, a high vacuum pump is required. Theoriginal pump used was a high-vacuum oil diffusion pump. Since oilvapors from the pump would contaminate the mass spectrometer sensinghead, liquid nitrogen traps were employed to freeze out the oil vaporsbefore reaching the sensing head. The use of liquid nitrogen was and isa difficult and costly process, as well as requiring the maintenance ofan adequate supply.

An alternative to the use of oil diffusion pumps has been the use ofturbomolecular pumps, which has only been commonplace within the lastfew years, owing to the refinement and development of these kinds ofpumps. The turbomolecular pump is essentially an axial-flow molecularturbine having a plurality of alternately-arranged slotted rotatingblades and stationary stator blades, with the relative velocity betweenthe two sets of blades making it highly probable that a gas moleculewill be transported from the pump inlet to the pump outlet. Since thegas is compressed only slightly by each stage, a series of such bladesare required to achieve an effective compression ratio and workable andeffective pressure differential. The turbomolecular pump deals withmolecular flow, with compression achieved via momenta-transfer from thehigh-speed rotating blades to the gas molecules. The operating exhaustpressure is in the range of about 30 millitorr, which extremely lowpressure, like the oil diffusion pump, has required complex andexpensive throttling valves to allow for the introduction of the probehelium gas into the sensing probe chamber, as explained above. The useof the turbomolecular pump, however, was an advancement in that it moreeffectively prevented the simultaneous introduction of oil vapors,though such was not completely eliminated as a problem, since anoil-sealed mechanical pump was required in series with theturbomolecular pump in order to achieve and sustain such extremely lowoperating pressures. The additional advantage provided was the fact thatturbomolecular pumps will pump heavy gases more readily and easily thanlighter gases, such as helium, so that the technique of "Back-Diffusion"or "Counter-Flow" was developed using the turbomolecular pumps, by whichthe probe helium gas to be detected was introduced at the outlet of theexhaust of the turbomolecular pump, with the probe helium diffusedrearwardly through the turbomolecular pump until it reached the sensorprobe of the mass spectrometer, the heavier air molecules having been"filtered out" or selectively eliminated by this process. The lawsgoverning such diffusion are based on molecular flow and statisticalthermodynamics. However, as stated above, complex throttling valves arestill required, owing to the extremely low exhaust pressure at the pumpoutlet.

The present invention is directed to a considerably improved helium-leakdetection system by which the detection-sensitivity is increased,oil-vapor diffusion is completely obviated, and the use of a throttlingvalve is eliminated. The present invention has achieved such aremarkable and improved leak-detection system by the use of therelatively recently-developed molecular drag pump instead of theturbomolecular pump above-described. The molecular drag pump, whichincludes the Gaede molecular drag pump, as well as the modern andgreatly advanced version of the old Holweck pump, compresses a gas alongthe axial flow-direction, in contradistinction to the turbomolecularpump which imparts compression transversely to the flow-direction. Inthe disc-type molecular drag pump, such compression is achieved by arotating rotor in which is formed a series of precisely-aligned andformed spiral grooves that cooperate with several parallel helicalgrooves formed in the stator. The use of the molecular drag pump in aleak-detection system has allowed for the above-noted advantages andimprovements as compared to the turbomolecular pump systems, since theoutlet or exhaust pressure of the molecular drag pump is of the order ofone-thousand times that of the turbomolecular pump: 30 torr as comparedwith 30 millitorr.

SUMMARY OF THE INVENTION

It is, therefore, the primary objective of the present invention toprovide a leak detection system that eliminates the need of expensiveand complex throttling valve structure, while also enhancing the overallsensitivity of the system to probe-gas, leak detection.

It is another objective of the present invention to provide such a leakdetection system that will allow for the detection of fine or grossleaks of a vacuum vessel without any adverse effect on the massspectrometer sensing head associated with the leak detection system ofthe invention.

It is yet another objective of the present invention to enhanceprobe-gas detection sensitivity to the leak detection system of theinvention by eliminating the possibility of oil-vapor contamination inthe detection chamber of the mass spectrometer associated with the leakdetection system of the invention.

It is still a further objective of the present invention to ensure thatthe leak detection system of the invention is readily capable of beingused in repetitive fashion, so that after one leak has been detected,the system may be used immediately again to detect another leak.

It is also an objective of the present invention to allow the detectionsystem of the present invention to be used for detecting other gasesbesides helium in other applications besides vacuum-vessel leakdetection.

Toward these and other ends, the leak detection system of the presentinvention incorporates a molecular drag pump as the first vacuum-formingpump for evacuating the detection chamber of the mass spectrometer whoseprobe detects the pressure of the probe gas helium leaking from a holeor crack of a vacuum vessel or container. The exhaust or outlet of themolecular drag pump is of the order of 30 torr, as compared with 30millitorr of the turbomolecular pump or diffusion pump. The very muchgreater exhaust pressure of the molecular drag pump has obviated theneed for complex throttling of the helium probe gas, as the pressuredifferentials from atmospheric (760 torr) to the exhaust of theturbomolecular pump are minute as compared to that of the turbomolecularor diffusion pump. In accordance with the present invention, the probegas is introduced at the exhaust of the high vacuum pump--the moleculardrag pump--for fine or minute leaks, just as in the case of theturbomolecular pump system. However, whereas in the turbomolecular pumpsystem, the helium penetrates into the mass spectrometer detectionchamber via molecular flow called molecular counter-flow or backdiffusion, the probe helium gas penetrates into the mass spectrometerdetection chamber via turbulent mixing or cavitation, since theoutflowing helium probe gas is not molecular flow but a combination ofturbulent, laminar and transitional flow. The present invention is alsobased on the discovery that light gases are very slowly pumped by amolecular pump, which discovery also has import to the general conceptof separation of gases, and, therefore, to applications outside ofhelium, gas-probe leak detection, to any application requiring thedetection or separation of one gas relative to others mixed therewith,which change of application is enabled by simple changes in systemicpressures associated with the exhaust port of the molecular drag pump,and the inlet and outlet pressures of the associated, back-up supportingpumps of the present invention for the high-vacuum, molecular drag pumpof the invention. The present invention has substituted complex gas flowfor the complex and expensive valving of the prior art systems. Thehigh-vacuum, molecular drag pump of the invention is supported by aseries of supporting pumps; A first pair of conventional diaphragmpumps, and a second pair of conventional piston pumps, all of thesesupport pumps being series-connected together and with the moleculardrag pump. Such an arrangement achieves a continual rebalancing ofpressures and flows, and gradually brings the last exhaust up toatmospheric pressure. By this very arrangement, very large and grossleaks may be detected, which hitherto has not been possible, by simplyintroducing the helium probe gas leakage at one of the other exhaustoutlets of the other pumps, rather than the exhaust outlet of themolecular pump. The helium probe gas, by the same principle of turbulentmixing or cavitation, will flow rearwardly through the pumping systemuntil it finally reaches the mass spectrometer detection chamber fordetection in the usual fashion. Since the exhaust pressure at any of theother support pumps is considerably greater than that of the exhaust ofthe molecular drag pump, and, of course, that of the turbomolecular pumpof prior art systems, not only is probe gas detection possible, but evencomplex throttling is unnecessary, as compared with prior art systemswhere even with complex throttling, gross leaks are not detectable,since the introduction of the probe gas leakage would destroy thehigh-vacuum requirement of the exhaust port of the high-vacuumturbomolecular or diffusion pump. Also in accordance with the presentinvention, in order to allow for quick, repetitive use of the detectionsystem for detecting another leak in a vacuum-vessel or container, anair-purge valve is provided at the molecular drag pump outlet, which airpurging valve is operated after each leak-detection. This is necessary,since the helium is pumped at very slow speeds by the molecular dragpump and its supporting pumps, which tends to saturate the system withhelium, the air purge eliminating the remaining helium so that the nexttest may be carried out.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be more readily understood with reference to theaccompany drawing, wherein:

FIG. 1 is a schematic of the prior-art leak-detection system fordetecting leaks in a vacuum-vessel or container;

FIG. 2 is a schematic of another prior art leak-detection system fordetecting leaks in a vacuum-vessel or container; and

FIG. 3 is a schematic of the leak-detection system of the presentinvention for detecting leaks in a vacuum-vessel or container.

DETAILED DESCRIPTION OF THE INVENTION

Referring now to the drawing in greater detail, FIGS. 1 and 2 show twoprior-art leak-detection systems. The one shown in FIG. 1, which was thefirst helium probe gas, leak-detection system in widespread use, likeall leak-detection systems, utilized a conventional mass spectrometeranalysis cell 10, which is tuned for the mass of helium (m/e=4, atomicweight). The probe gas, helium, is pumped into a vacuum vessel orcontainer to be tested, with the sensing probe of the mass spectrometer10 being used about the entire outer circumferential surface of thevessel or container to detect any outflow of helium, which would thenindicate an origin of a leak in the vessel, which may then be repaired.Connected to the mass spectrometer 10 is a high-vacuum oil-diffusionpump 12, which creates a very high vacuum in the analysis cell'schamber, which high vacuum is typically less than 0.0002 millibar. Thediffusion pump 12 typically has an exhaust pressure of 30 millitorr.Owing to the very high vacuum required, the probe helium cannot beallowed to enter freely into the analysis cell of the mass spectrometer,since such probe gas is exiting the vacuum vessel at or near atmosphericpressure, which would destroy the high vacuum of the cell, and would,thus, render such cell inoperative. To overcome such problems, the priorart system of FIG. 1 utilizes a specially-designed, complex andexpensive throttling valve structure 14, which meters the flowing heliumand allows for the transition from atmospheric to high vacuum to takeplace without adversely affecting the functioning of the analysis cell.The probe helium is directly introduced, via the throttling valvestructure, into the analysis cell of the mass spectrometer. A mechanicalsupport pump 16 is connected to the exhaust of the oil-diffusion pump tobring the exhaust up to atmospheric. The drawbacks with the system ofFIG. 1 is not only the requirement for complex and expensive throttlingvalve structure, but the contamination from oil vapors effused into thesystem via the oil diffusion pump 12, which also necessitated theprovision of liquid nitrogen traps to freeze out the oil vapors beforereaching the cell's sensing head. This had meant that a large supply ofliquid nitrogen must be provided and maintained, which is costly anddifficult. The system of FIG. 1 is still in use to this day.

A more recent prior-art leak-detection system is shown in FIG. 2. Thissystem utilizes a turbomolecular pump 22 to create the high vacuum inthe analysis cell of the mass spectrometer 20. The turbomolecular 22also operates at exhaust pressures of approximately 30 millitorr. Theturbomolecular pump 22 must be backed by a mechanical pump 24, which isan oil-sealed pump, posing the potential problem of oil-vaporcontamination as in the system of FIG. 1. The main difference betweenthe system of FIG. 2 with respect to the system of FIG. 1 is that theprobe helium gas is not introduced directly into the analysis cell ofthe mass spectrometer 20, but is introduced at the exhaust of theturbomolecular pump 22. The helium thus introduced flows back into theanalysis cell chamber of the spectrometer 20 via what is called"counter-flow" or "back-diffusion" through the turbomolecular pump 22.The helium probe gas is introduced at the exhaust of the turbomolecularpump 22 via the same type of throttling valve structure 26 as that ofthe system of FIG. 1, such being a prerequisite to the operation of thesystem of FIG. 2, since the exhaust pressure of the turbomolecular pumpis so low, that any introduction of the gas without such metering wouldmake the system of FIG. 2 inoperative. The counter-flow of the heliumprobe gas is possible since the flow of the helium from the throttlingvalve 26 is molecular flow. Statistical thermodynamics governs suchflow, ensuring the great probability that some of these molecules willflow backward through the pump and finally reach the sensing chamber ofmass spectrometer for detection thereby. However, as explained, thesystem of FIG. 1 still requires the expensive and complex throttling ofthe gas into molecular flow, and still poses the same risk of oil-vaporcontamination via the oil-sealed mechanical support pump 24, though theintroduction of the probe gas at the exhaust of the high-vacuum pump 22rather than directly into the sensing chamber of mass spectrometerdecreases the chances of such oil contamination and of inoperativenessof the sensing chamber.

The leak-detection system of the present invention is shownschematically in FIG. 3, and includes a conventional mass spectrometer30 with helium sensing cell, as in the prior-art systems. However, thehigh-vacuum pump for creating and sustaining the high vacuum in thesensing cell is a molecular drag pump 32, which is quite different fromthe oil diffusion pump 12 and turbomolecular pump 22. The flow throughthe molecular drag pump is axially, as compared to the transverse flowof the turbomolecular pump, and has an operating exhaust pressure ofapproximately 30 torr, as compared to the 30 millitorr of the diffusionpump and turbomolecular pump, which is of the order of one-thousandtimes greater. This much greater exhaust pressure of the molecular dragpump not only allows for the creation of the necessary vacuum in theanalysis cell, but, also means that the flow at the exhaust thereof isnot molecular but a combination of turbulent (viscous), laminar, andtransitional flows. Thus, owing to this much greater exhaust pressure,and ensuing nonmolecular flow thereof, it is possible to introduce theprobe helium gas at the exhaust of the molecular drag pump without therequirement of first throttling, since molecular flow at the exhaust ofthe high-vacuum pump is not an issue, as it is in the systems of FIGS. 1and 2. Thus, in the present invention, the helium probe gas may beintroduced into the detection system at the exhaust of the moleculardrag pump without the need of expensive and complex throttling valvestructure, and without the need of special helium-selective gasbarriers, the equivalent of the complex throttling technique, but isintroduced by simple and conventional tubing. The molecular drag pump 32is backed by a series-connected, oil-free, dry, support pumps togradually bring the system up to atmospheric at the outlet of thesystem. These support pumps are a pair of series-connected diaphragmpumps 34, 36 such as those manufactured by Thomas Industries, Inc. ofSheboygan, Wisconsin, Model Nos. 2107CA, 2107CB, 2107CD, and a pair ofseries-connected piston pumps, 38 40, such as those manufactured byThomas Industries, Inc., Model Nos. 004CA33, 004 CD33M, 004CD33, and004CC33. The molecular drag pump may be that manufactured by AlcatelVacuum Products, Inc., of Hingham, Massachusetts, model MDP 5010, whichincludes a Gaede-stage and a Holweck-stage in series. The use of thesesupport pumps is that on the way to becoming atmospheric, the flowingmedia of the system experiences a continual rebalancing of flow andpressure between the pumps as the transition from high vacuum toatmospheric is achieved. The use of oil-free pumps also prevents thepotential hazards of oil-vapor contamination, prevalent in prior-artsystems.

In accordance with the present invention, the system of FIG. 3introduces the helium probe gas between the exhaust outlet of themolecular drag pump 32 and the inlet port of the diaphragm pump 34. Inthis manner, there is a semblance to that of the system of FIG. 2, inthat the helium probe gas is introduced between the high vacuum pump anda support pump. However, in the present invention, such introduction ofthe helium probe gas is achieved without costly and complex throttlingvalve structure, but introduced with the all of the naturally-occurring,complex flow characteristics thereof: Turbulent, laminar andtransitional. According to the present invention, the helium is allowedto flow back into the sensing cell of the mass spectrometer 30 by theprocesses of cavitation and turbulent mixing. Thus, the complex flowpatterns of the helium stream will ensure by these processes that somehelium gas will travel rearwardly through the molecular pump and intothe sensing cell of the mass spectrometer 30. Such flow is not molecularflow, as in the case of the "back-diffusion" or "counter-flow" of thesystem of FIG. 2, but is complex flow that includes turbulent flow andthe ensuing mixing and cavitation achieved thereby, which forces somehelium rearwardly through the molecular drag pump 32 by dynamic mixing.The molecular drag pump will pump heavier gases, such as air, quiteeasily and readily. However, it will pump only very slightly lightgases, such as helium. Thus, the high vacuum, molecular drag pump 32creates and sustains the high vacuum in the sensing cell of the massspectrometer, but will not readily pump out the helium flowingbackwardly therein, so that detection of the helium and the leak may bereadily and very accurately achieved.

The helium, as mentioned above, is introduced into the system of theinvention between the molecular drag pump 32 and the diaphragm pump 34.This is for fine or small leaks. The helium thus introduced willexperience complex flow, including turbulence, which turbulence arisesfrom viscous flow conditions, vortex conditions within the tubingconnecting the helium to the system proper, and due to the mechanicalaction of the pumps. Before such helium is introduced, the system is inequilibrium with a no-flow state existing between the pumps. Upon theintroduction of the helium stream, such equilibrium is destroyed, and anew "mixing" equilibrium will result, with the helium now dispersedalong all of the different components of the system. The greater thepressure drop in any part of the system, the less helium present,although every part of the system will have helium present. Thus, it ispossible to introduce the helium probe gas at any juncture in the systemof FIG. 3, and still have some helium mix via dynamic mixing and flowrearwardly until it is present within the sensing cell of the massspectrometer. As mentioned above, for fine leaks, the helium isintroduced between the exhaust of the molecular drag pump 32 and theinlet port of the diaphragm pump 34. However, for large or gross leaks,hitherto not possible of detection by the prior-art systems, the heliumprobe gas is introduced between the exhaust port of one of the supportpumps and the adjacent inlet port of the next support pump, such as, forexample, between the exhaust of the diaphragm pump 36 and the inlet portof the piston pump 38, as shown in FIG. 3. Owing to the greater amountsbeing mixed with gross leaks as compared with fine leaks, introductionfurther upstream of the helium probe gas is possible in the system ofthe present invention, where the line pressures thereof are considerablygreater than the exhaust port of the molecular drag pump 32, whereby theexhaust pressure, and thus the operation, of the high vacuum moleculardrag pump 32 will not be adversely affected by a sudden introduction ofa large volume of turbulent flow. For large or gross leaks, the probegas may be injected between any two of the support pumps, depending uponthe intensity of such leak. Since the helium is not readily pumped bythe molecular drag pump, there is provided an air purge via valve 44.This valve is used after each leak-detection, and "flushes" the systemclean from accumulated helium. If this air purge were not used, it wouldtake days or even weeks for the molecular drag pump to pump out all ofthe helium accumulated in the sensing chamber. Operation of theconventional valve 44 provides a stream of atmospheric air into thesystem, entraining all of the helium molecules, and allowing for thepumping thereof, since air is readily pumped by the molecular drag pump32, carrying along with it the entrained helium molecules. In thepreferred embodiment, the air purge valve 44 is located at the exhaustof the molecular drag pump, where its effect is more immediate.

In the preferred embodiment of the invention, in use for detecting leaksin vacuum vessels via the probe gas helium, the equilibrium pressure atthe exhaust of the molecular drag pump and at the inlet to the diaphragmpump 34 is 3.4 torr; the pressure at the exhaust outlet of the diaphragmpump 34 and the inlet port of the diaphragm pump 36 is 11 torr; thepressure at the exhaust port of the diaphragm pump 36 and the inlet ofthe piston pump 38 is 30 torr; the pressure at the exhaust of the pistonpump 38 and the inlet of the piston pump 40 is 350 Torr; and the exhaustpressure of the outlet of the piston pump 40 is, of course, 760 torr,atmospheric. As stated, there are the operating pressures when thesystem of FIG. 3 is used as a vacuum leak-detection system and helium isthe probe gas. However, the system of FIG. 3 may be used in otherenvironments and applications, such as, for example, the separation ofgases, such as hydrogen, from other gases; for separating gases fromholes bored in the earth; and in nuclear reactors for separation ofgases. This is accomplished since the molecular drag pump will pumplight gases very slowly, if at all, while readily and speedily pumpingheavier gases. By selecting the appropriate operating pressures andpumping speeds of the pumps 32-40 of the system of the invention, achosen light gas may be separated from ambient gas or carrier-gas by thesame process of dynamic mixing and reverse flow, as described above. Insimple gas separation applications, the mass spectrometer 30 is notneeded, and is replaced with a storage container for storing theseparated gas. Depending upon the flow conditions of the injectedstream, such injected stream may be inputted or introduced between twoadjacent pumps of the series of pumps 32-40. In the preferred embodimentof leak-detection, the gas inputted or introduced is helium mixed withair, and the separation that occurs is the helium from the air, which isreadily achieved since the molecular drag pump will readily and quicklypump air but will not do so for helium. The same principle applies inall other applications, where the one gas to be separated by the systemof FIG. 3 is not readily pumped by the molecular drag pump or is pumpedat least slower than the remaining gas or gases from which separation isoccurring. Each application of the present invention will require itsown unique set of operating pressures for the inlets and outlets of thepumps 32-40, as well as unique pumping speeds thereof, whereby thesepressures and speeds will vary depending upon the particular gas beingseparated and the environment in which the gas is found. Thus, it may beseen that the present invention has a wide application, applicable notonly to vacuum-vessel leak-detection, but broadly to the separation ofgases in general, as long as the gases being separated have differentmolecular weights.

While a specific embodiment of the invention has been shown anddescribed, it is to be understood that numerous changes andmodifications may be made therein without departing from the scope,spirit and intent of the invention as set forth in the appended claims.

What I claim is:
 1. In a leak-detection system for detecting leaks invacuum vessels and containers, which system comprises helium-detectionmeans for sensing the presence of helium, which helium is a probe gasinjected into a vacuum vessel or container being tested for leaks,high-vacuum pump means connected to said helium-detection means forforming a high vacuum in said helium-detection means, means fordirecting helium probe gas from a leak to the outlet of said high-vacuumpump means, and support pump means connected to the outlet of saidhigh-vacuum pump means for exhausting the system to the environmentalsurroundings, the improvement comprising:said high-vacuum pump meanscomprising a molecular drag pump having an inlet in fluid communicationwith the interior of said helium-detection means, and an outlet in fluidcommunication with said means for directing.
 2. The improvementaccording to claim 1, wherein said means for directing introduces thehelium probe gas from a leak to said outlet of said molecular drag pumpin a flow having turbulent flow characteristics.
 3. The improvementaccording to claim 2, wherein said flow also comprises laminar andtransitional flow characteristics.
 4. The improvement according to claim2, wherein said means for directing comprises conduit means in fluidcommunication with said outlet of said molecular drag pump for fluidlycoupling said outlet with the leaking helium.
 5. The improvementaccording to claim 1, wherein said support pump means comprises at leastone oil-free pump having an inlet fluidly coupled to said outlet of saidmolecular drag pump; said means for directing directing the leakinghelium probe gas between said outlet of said molecular drag pump andsaid inlet of said at least one oil-free pump.
 6. The improvementaccording to claim 5, wherein said support pump means comprises aplurality of oil-free dry pumps, at least one thereof being a drydiaphragm pump and at least one thereof being a dry piston pump.
 7. Theimprovement according to claim 6, wherein said support pump meanscomprises a pair of series-connected diaphragm pumps, and a pair ofseries-connected piston pumps, said diaphragm pumps being positionedupstream and closer to said molecular drag pump as compared to saidpiston pumps, each said pump of said support pump means comprising aninlet and an outlet.
 8. The improvement according to claim 7, furthercomprising means for introducing leaking helium probe gas between onesaid outlet of one said pump of said support pump means and one saidinlet of another, directly adjacent pump of said support pump means fordetecting gross leaks.
 9. The improvement according to claim 5, whereinsupport pump means comprises a plurality of dry pumps connected inseries, each of said plurality of pumps having an inlet and an outlet;and means for introducing leaking helium probe gas between one saidoutlet of one of said plurality of pumps and one said inlet of another,directly adjacent pump of said plurality of pumps, whereby gross leaksmay be detected.
 10. The improvement according to claim 1, furthercomprising means for injecting a stream of higher-pressure ambient gasinto said outlet of said molecular drag pump for purging saidhelium-detection means and the remainder of the system of accumulatedhelium.
 11. A leak-detection system for detecting leaks in vacuumvessels and containers, comprising:a mass spectrometer comprising adetecting chamber and means for sensing the presence of a probe gas insaid detecting chamber, said detecting chamber being evacuated to a highvacuum; first pump means connected to said detecting chamber for forminga high vacuum therein; said first pump means comprising a molecular dragpump having an inlet port coupled connected to said detecting chamber,and an outlet exhaust port; second pump means having an inlet portconnected to said exhaust port of said molecular drag pump, said secondpump means also having an outlet port; a third pump means having aninlet port connected to said outlet port of said second pump means, andan outlet port, said second and third pump means supporting saidmolecular drag pump; means for introducing leaking probe gas into atleast one of said exhaust port of said molecular drag pump and saidexhaust port of said second pump means, whereby the probe gas by dynamicmixing flows backwardly into said detecting chamber of said massspectrometer.
 12. The leak-detection system according to claim 11,further comprising a fourth pump means having an inlet port connected tosaid exhaust port of said third pump means, and an outlet port; and afifth pump means having an inlet port connected to said exhaust port ofsaid fourth pump means and outlet port, said fourth and fifth pump meansserving also as support pumps, for bringing the exhaust of the system upto atmospheric.
 13. The leak-detection system according to claim 12,wherein said means for introducing leaking probe gas further comprisesmeans for introducing the leaking probe gas at the exhaust port of atleast one of said third and fourth pumps.
 14. The leak-detectionaccording to claim 13, wherein each of said second and third pump meanscomprises a diaphragm pump, and each of said fourth and fifth pump meanscomprises a piston pump.
 15. The leak-detection system according toclaim 11, further comprising air purging means for injecting ambient gasinto the exhaust port of one of said pump means for purging the systemof any accumulated probe gas.
 16. The leak-detection system according toclaim 15, wherein said probe gas is helium; and said means forintroducing the probe gas comprises means for injecting helium to arespective said exhaust port such that the helium has turbulent,laminar, and transitional flow characteristics.
 17. A method ofdetecting leaks in a vacuum vessel or container, into which a probe gashas been injected, comprising:directing the outflow of a leaking probegas to the exhaust of a molecular drag pump; said step of directingcomprising introducing the outflow such that it has dynamic flowproperties of turbulent, laminar, and transitional flows; allowing theprobe gas after said of directing to flow upstream through the exhaustof the molecular drag pump toward the inlet of the molecular drag pumpwhereby dynamic flow is converted to molecular flow; sensing themolecular flow of the probe gas emanating from the inlet of themolecular drag pump, whereby the probe gas is detected thereby.
 18. Themethod according to claim 17, wherein said step of directing comprisesdirecting helium probe gas; and said step of sensing comprises sensingthe presence of helium with a mass spectrometer.
 19. The methodaccording to claim 17, further comprising the step of introducing anoutflow of probe gas to the exhaust outlet of another pump supportingthe molecular drag pump, whereby gross leaks may be detected.